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ULVAC Model LR600

Here we offer an ULVAC dry vacuum pump.
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ULVAC Dry Vacuum Pump
Solution for harsh process applications
Dry vacuum pump
ULVAC’s unique approach to utilizing latent heat within the pump body enables the LR / HR / UR series to deliver high performance even under the most demanding conditions.
ULVAC focused its engineering efforts on maintaining an extremely uniform, high temperature across all pump stages, making this pump family optimized for CVD and etching applications.
Compatible with ULVAC’s ECO-SHOCK system for additional energy savings.

Features
The LR series pump is designed for load-lock chambers and PVD processes.
ULVAC’s unique aluminum design allows for exceptionally even temperature distribution throughout the pump body.
The ULVAC LR series pump is intended for applications requiring a heated pump, heated gas lines, and/or heated exhaust lines.
Outstanding helium pumping capacity
Hermetically sealed motor for safety and ease of maintenance
Withstands power interruptions of up to 500 ms
Internal components are specially treated to ensure a high degree of surface hardness and excellent corrosion resistance.
This prevents wear of internal pump parts when exposed to corrosive gases. (LR series)
Designed for process gases that generate particulate by-products, such as Si crystal growth furnaces
Fore-vacuum pump for turbomolecular and mechanical booster pumps
Type: LR600
Condition: new
Scope of delivery: (see picture)
(Specifications subject to change and error!)
For further questions, please feel free to contact us by phone.

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