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Bobst Group SA Roll-To-Roll Sputtering

Sputtering system GVE/Optilab: Roll-to-roll system for depositing ultra-thin layers (in the nanometer range). The system is capable of depositing various materials (metals, transparent conductive oxides) onto film substrates. It is equipped with multiple sputtering cathodes, allowing for simultaneous deposition of several thin layers.

GVE, Bobst Ltd, Optilab, 2010, Vacuum roll-to-roll sputtering tool with 3 deposition chambers, each designed for 2 cathodes; Complete with: - 520mm web width, bi-directional winding with interleave and de-interleave capabilities. Turbo-molecular pumps (maglev) in all zones. Drum chiller, reheat unit (temperature range -20°C to +200°C). 1100 polycold unit with cryo coils in each sputtering and in the winding zone. One GVE AC medium-frequency plasma power supply. Post-coating resistance monitoring system (measures resistance on the centerline of the web). One Siemens WIN CC touchscreen system for machine and monitoring control. IR heating zone (3 heating units). Web biasing system (including PSU, etc.). 1 generator mag complete with two 20 kW pulsed DC outputs. 1 dual mag unit complete with two 10 kW pulsed DC outputs (with concealed anode). MFCs etc. 1 fully integrated PEM sputter control system. Original price: EUR 1,450,000.-
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