„Alcatel Adixen AD100K“ aukšto vakuumo

Alcatel Adixen AD100K AD30K 600-4500 m3/h.

Adixen AD30K Dry Pump, High Vacuum
The new high-performance dry-running pumps:
The ADH series is specifically designed for solar applications,
developed for the demanding processes of the semiconductor and LED markets,
with a pumping speed of 600–4500 m3/h.

Semiconductors: High H2 pumping rate
The performance of the ADH series provides the following process benefits:
- ADL process performance: high pumping efficiency for light gases
enables faster chamber evacuation between process steps
- Epitaxy and EUV: high pumping capacity and flow rate
meets the most demanding process specifications

Adixen AD30K Dry Pump, High Vacuum, AD 30 KL
Manufacturer: Alcatel Adixen
Dcodpfx Ajikq Tyodmon
Type: AD30K.H
Year of manufacture: 2008

Adixen AD100K.H
Manufacturer: Alcatel Adixen
Type: AD100K.H
Year of manufacture: 2008

Vacuum Pump:
Manufacturer: AERZEN
Type: GM 2000 CM-C
Speed: 6,000 rpm
Voltage: 200–460 V
Frequency (mineral oil/PFPE oil): 100 Hz
Max. pumping speed: 4,035 m3/h
Max. speed: 5,920 rpm
Motor power S1 / S6: 9 / 5.6 kW
Year of manufacture: 2008
Weight: 345 kg

Dry Pump:
Manufacturer: Adixen
Type: BF ADP122
Year of manufacture: 2008
Power: 1.5 kW
Max. pumping speed: 95 m3/h
Max. continuous inlet pressure: 50 mbar
Max. exhaust overpressure: 1,200 mbar
Cooling water: 60 l/h
Pump speed: 3,000–3,600 rpm
Operating temperature of pump: from 5 °C to 40 °C
Inlet flange: DN 50 ISO-KF
Exhaust flange: DN 40

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